Devs-based Semiconductor Process Scheduling Using the Multifacetted System Modelling and Discrete Event Simulation
نویسندگان
چکیده
Short cycle time prediction is a well-documented problem in complex-process manufacturing such as semiconductor manufacturing. In general, the amount of production in wafer fabrication is dependent on bottleneck facilities. In this paper, we compare scheduling methods to increase the production of the wafer fabrication. We model the process based on DEVS (Discrete Event System)/SES (System Entity Structure) and estimate our methods whose models are created from the SES through pruning processes.
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